Diamond Radiator Thinning Using an Excimer Laser - Revision history

Bpratt18: /* Focal Spot Characterization */

2016-12-15T22:46:59Z

Focal Spot Characterization

Bpratt18: /* Excimer Laser */

2016-12-15T22:46:47Z

Excimer Laser

Bpratt18: /* Sub-Micron Precision Using Dial Indicators */

2016-12-15T22:46:21Z

Sub-Micron Precision Using Dial Indicators

Bpratt18: /* Sub-Micron Precision Using Dial Indicators */

2016-12-15T22:45:57Z

Sub-Micron Precision Using Dial Indicators

Bpratt18: /* Ablation Chamber */

2016-12-15T22:44:38Z

Ablation Chamber

Bpratt18: /* Ablation Chamber */

2016-12-15T22:44:14Z

Ablation Chamber

Bpratt18: /* FORTRAN Simulations of Beam Spot */

2016-12-15T22:43:42Z

FORTRAN Simulations of Beam Spot

Bpratt18: /* Ablation Rate */

2016-12-15T22:42:52Z

Ablation Rate

Bpratt18: /* Focal Spot Characterization */

2016-12-15T22:42:14Z

Focal Spot Characterization

Bpratt18: /* Laser Beamline */

2016-12-15T22:40:11Z

Laser Beamline

← Older revision		Revision as of 22:46, 15 December 2016
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	Figure 6 shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. Figure 7 shows the improvement in beam shape gained after using the three lens setup.		Figure 6 shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. Figure 7 shows the improvement in beam shape gained after using the three lens setup.
	If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX. The focus of the laser defines the cutting tool with which the diamond is shaped. An ill-defined focused will ablate non-uniformly as the diamond is rastered across it making it extremely difficult to cut uniformly to 20 µm thickness without cracking the thin diamond membrane. The geometry of the focus also determines the fluence (laser energy per cm2 ) incident on the diamond surface. A tightly focused beam spot increases the available fluence, increasing the rate of ablation. It is therefore very important to measure the waist of the beam after L3 in the three lens system.		If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX. The focus of the laser defines the cutting tool with which the diamond is shaped. An ill-defined focused will ablate non-uniformly as the diamond is rastered across it making it extremely difficult to cut uniformly to 20 µm thickness without cracking the thin diamond membrane. The geometry of the focus also determines the fluence (laser energy per cm2 ) incident on the diamond surface. A tightly focused beam spot increases the available fluence, increasing the rate of ablation. It is therefore very important to measure the waist of the beam after L3 in the three lens system.
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 ==Excimer Laser==
 A Lambda Physik EMG 101 argon fluorine (ArF) excimer laser (shown in Figure 2) with an operating wavelength of 193 nm was used to ablate single-crystal CVD diamond. The laser is capable of delivering 120 mJ at a maximum repetition rate of 50 Hz and pulse duration of 20 nanoseconds. The pulse geometry is an asymmetrical flat top Gaussian with horizontal dimensions of 22 mm and vertical dimensions of 6 mm.
-[[Image:Laser setup.jpg|center|300px|Figure 2: Image of Lambda Physik EMG 101 MSC excimer laser with cover removed.]]
+[[Image:Laser setup.jpg|center|thumb|300px|Figure 2: Image of Lambda Physik EMG 101 MSC excimer laser with cover removed.]]
 This particular laser shown in Figure 2 was over 30 years old when we first acquired it for the project. Much of my time (maybe too much :) ) has been spent restoring it so that it could maintain high energy levels for extended periods of time. All of my troubles are explicitly detailed in my logbooks which can be shared on request.

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 [[Image:iso2.png|center|thumb|300px|Figure 16: Rendering of ablation setup showing position of dial indicator used to locate the x-translation stage.]]
 As shown in the figure above the ablation chamber is mounted on two orthogonal translation stages, both with bidirectional repeatability of <1.5 µm and minimum achievable incremental movement of 0.05 µm/. The x-stage moves the diamond in the horizontal plane with respect to the lab floor. The y-stage increments at a 45◦ angle to the lab floor which is in the same plane as the diamond. Digital dial indicators with sub-micron resolution were installed to measure the positions of the x and y translation stage and were used in a study to measure the non-linearity of the y-translation stage motor. Non-linearity (movement in the lead-screw of the translation stage which does not place the stage at the requested position) of the y-stage is critical due to the row-by-row rastering sequence used to deferentially ablate the diamond sample. Each row has a unique sequence of laser pulses that correspond to an exact position on the diamond and the control of the ablation rate relies on the overlap between these rows. The dial indicator shown in Figure 16 is placed at a 45◦ angle and makes contact with an aluminum extension mounted to the y-stage. The dial indicator has a rolling bearing attached to its end so that it rides along the extension as the x-translation stage moves back and forth. The ablation chamber was moved to a series of y coordinates and the difference between the desired displacement and the displacement measured by the dial indicator was taken and is shown in Figure 17a.
-The same study was conducted again, but the dial indicator was used to 17 require that the y-translation stage fall within 1 µm of the desired position. This was accomplished by creating an internal loop within the LabView software responsible for the movement of the translation stages. At the beginning of the sequence, the y-stage is homed and brought to an origin position. The reading of the dial indicator at this origin is recorded and all subsequent moves in the y-stage coordinate system are translated into the dial indicator coordinate system using this value. After the y-stage moves to the provided coordinate, the LabView software queries the dial indicator for a position. If the dial indicator value matches the expected value to within a micron, the sequence continues, if not the y-stage is moved by the dial indicator difference in position and the dial indicator is queried again until the 1 micron condition is satisfied. Figure 17b illustrates the improvement made to the y-stage which now has the accuracy of 1 micron. The study concluded that position of the diamond relative to the focal spot would be determined by the sub-micron dial indicators in both the x and y axis.
+The same study was conducted again, but the dial indicator was used to require that the y-translation stage fall within 1 µm of the desired position. This was accomplished by creating an internal loop within the LabView software responsible for the movement of the translation stages. At the beginning of the sequence, the y-stage is homed and brought to an origin position. The reading of the dial indicator at this origin is recorded and all subsequent moves in the y-stage coordinate system are translated into the dial indicator coordinate system using this value. After the y-stage moves to the provided coordinate, the LabView software queries the dial indicator for a position. If the dial indicator value matches the expected value to within a micron, the sequence continues, if not the y-stage is moved by the dial indicator difference in position and the dial indicator is queried again until the 1 micron condition is satisfied. Figure 17b illustrates the improvement made to the y-stage which now has the accuracy of 1 micron. The study concluded that position of the diamond relative to the focal spot would be determined by the sub-micron dial indicators in both the x and y axis.
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 ==Sub-Micron Precision Using Dial Indicators==
-[[Image:iso2.png|center|thumb|300px|Figure: Rendering of ablation setup showing position of dial indicator used to locate the x-translation stage.]]
+[[Image:iso2.png|center|thumb|300px|Figure 16: Rendering of ablation setup showing position of dial indicator used to locate the x-translation stage.]]
-As shown in the figure above the ablation chamber is mounted on two orthogonal translation stages, both with bidirectional repeatability of <1.5 µm and minimum achievable incremental movement of 0.05 µm/. The x-stage moves the diamond in the horizontal plane with respect to the lab floor. The y-stage increments at a 45◦ angle to the lab floor which is in the same plane as the diamond. Digital dial indicators with sub-micron resolution were installed to measure the positions of the x and y translation stage and were used in a study to measure the non-linearity of the y-translation stage motor. Non-linearity (movement in the lead-screw of the translation stage which does not place the stage at the requested position) of the y-stage is critical due to the row-by-row rastering sequence used to deferentially ablate the diamond sample. Each row has a unique sequence of laser pulses that correspond to an exact position on the diamond and the control of the ablation rate relies on the overlap between these rows. The dial indicator shown in Figure 11 is placed at a 45◦ angle and makes contact with an aluminum extension mounted to the y-stage. The dial indicator has a rolling bearing attached to its end so that it rides along the extension as the x-translation stage moves back and forth. The ablation chamber was moved to a series of y coordinates and the difference between the desired displacement and the displacement measured by the dial indicator was taken and is shown in Figure 12a.
+As shown in the figure above the ablation chamber is mounted on two orthogonal translation stages, both with bidirectional repeatability of <1.5 µm and minimum achievable incremental movement of 0.05 µm/. The x-stage moves the diamond in the horizontal plane with respect to the lab floor. The y-stage increments at a 45◦ angle to the lab floor which is in the same plane as the diamond. Digital dial indicators with sub-micron resolution were installed to measure the positions of the x and y translation stage and were used in a study to measure the non-linearity of the y-translation stage motor. Non-linearity (movement in the lead-screw of the translation stage which does not place the stage at the requested position) of the y-stage is critical due to the row-by-row rastering sequence used to deferentially ablate the diamond sample. Each row has a unique sequence of laser pulses that correspond to an exact position on the diamond and the control of the ablation rate relies on the overlap between these rows. The dial indicator shown in Figure 16 is placed at a 45◦ angle and makes contact with an aluminum extension mounted to the y-stage. The dial indicator has a rolling bearing attached to its end so that it rides along the extension as the x-translation stage moves back and forth. The ablation chamber was moved to a series of y coordinates and the difference between the desired displacement and the displacement measured by the dial indicator was taken and is shown in Figure 17a.
-The same study was conducted again, but the dial indicator was used to 17 require that the y-translation stage fall within 1 µm of the desired position. This was accomplished by creating an internal loop within the LabView software responsible for the movement of the translation stages. At the beginning of the sequence, the y-stage is homed and brought to an origin position. The reading of the dial indicator at this origin is recorded and all subsequent moves in the y-stage coordinate system are translated into the dial indicator coordinate system using this value. After the y-stage moves to the provided coordinate, the LabView software queries the dial indicator for a position. If the dial indicator value matches the expected value to within a micron, the sequence continues, if not the y-stage is moved by the dial indicator difference in position and the dial indicator is queried again until the 1 micron condition is satisfied. Figure 12b illustrates the improvement made to the y-stage which now has the accuracy of 1 micron. The study concluded that position of the diamond relative to the focal spot would be determined by the sub-micron dial indicators in both the x and y axis.
+The same study was conducted again, but the dial indicator was used to 17 require that the y-translation stage fall within 1 µm of the desired position. This was accomplished by creating an internal loop within the LabView software responsible for the movement of the translation stages. At the beginning of the sequence, the y-stage is homed and brought to an origin position. The reading of the dial indicator at this origin is recorded and all subsequent moves in the y-stage coordinate system are translated into the dial indicator coordinate system using this value. After the y-stage moves to the provided coordinate, the LabView software queries the dial indicator for a position. If the dial indicator value matches the expected value to within a micron, the sequence continues, if not the y-stage is moved by the dial indicator difference in position and the dial indicator is queried again until the 1 micron condition is satisfied. Figure 17b illustrates the improvement made to the y-stage which now has the accuracy of 1 micron. The study concluded that position of the diamond relative to the focal spot would be determined by the sub-micron dial indicators in both the x and y axis.
 {| cellpadding="3" style="text-align:center; margin: 1em auto 1em auto"
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-| [[Image:deltay_bad.png|left|thumb|300px|Figure: The histogram shown in Figure 11a displays the difference between the position reported by the y-stage and the position measured by the dial indicator. The wide RMS suggests a large non-linearity in the motor.]] || &nbsp; ||
+| [[Image:deltay_bad.png|left|thumb|300px|Figure 17a: The histogram shown in Figure 17a displays the difference between the position reported by the y-stage and the position measured by the dial indicator. The wide RMS suggests a large non-linearity in the motor.]] || &nbsp; ||
-  [[Image:deltay_good.png|right|thumb|300px|Figure: R The histogram in Figure 11b shows the same difference after the dial indicator was used to correct for the non-linearity in the y-stage.]]
+  [[Image:deltay_good.png|right|thumb|300px|Figure 17b: R The histogram in Figure 17b shows the same difference after the dial indicator was used to correct for the non-linearity in the y-stage.]]
 |-
 |}

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 ==Ablation Chamber==
 An aluminum vacuum chamber was machined at UConn to house the diamond during the ablation process as shown in the figure below.
-[[Image:ablationchamber.png|center|400px|Figure 14: CAD drawing of ablation chamber]]
+[[Image:ablationchamber.png|center|thumb|400px|Figure 14: CAD drawing of ablation chamber]]
 A roughing pumps was attached to one of the ports on the ablation chamber while a second port was connected to a digital flow controller and needle valve. This enabled the user to maintain a constant pressure to within 1 mtorr over the course of an ablation run. Vacuum pressures of a few tens of mtorr were achievable using this setup, however were not typically desired due to the large amounts of amorphous carbon build up after ablation occurred.
 [[Image:iso1.png|center|thumb|300px|Figure 15: Rendering of ablation setup showing position of dial indicator used to locate the x-translation stage.]]

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-| [[Image:r0(2)r0(1).jpg|left|thumb|300px|Original Beam Profile]] || &nbsp; || [[Image:r2.png|right|thumb|300px|Focused Beam Profile]]
+| [[Image:r0(2)r0(1).jpg|left|thumb|300px|Figure 12a:Original Beam Profile]] || &nbsp; || [[Image:r2.png|right|thumb|300px|Figure 12b:Focused Beam Profile]]
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-| [[Image:g_r1X.png|left|thumb|300px|X-axis Projection of Focused Beam]] || &nbsp; || [[Image:g_r1Y.png|right|thumb|300px|Y-axis Projection of Focused Beam]]
+| [[Image:g_r1X.png|left|thumb|300px|Figure 13a:X-axis Projection of Focused Beam]] || &nbsp; || [[Image:g_r1Y.png|right|thumb|300px|Figure 13b:Y-axis Projection of Focused Beam]]
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-| [[Image:cutrate_raw.png|left|thumb|300px|Zygo image of 7mmx7mm diamond cut using laser operating 193nm with varying output energy]] || &nbsp; ||
+| [[Image:cutrate_raw.png|left|thumb|300px|Figure 10:Zygo image of 7mmx7mm diamond cut using laser operating 193nm with varying output energy]] || &nbsp; ||
-  [[Image:cutrate_fit.png|right|thumb|300px|Calculated ablation rate in diamond as a function of laser energy fit with a second order polynomial]]
+  [[Image:cutrate_fit.png|right|thumb|300px|Figure 11:Calculated ablation rate in diamond as a function of laser energy fit with a second order polynomial]]
 |-
 |}

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 Figure 6 shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. Figure 7 shows the improvement in beam shape gained after using the three lens setup.
 If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX. The focus of the laser defines the cutting tool with which the diamond is shaped. An ill-defined focused will ablate non-uniformly as the diamond is rastered across it making it extremely difficult to cut uniformly to 20 µm thickness without cracking the thin diamond membrane. The geometry of the focus also determines the fluence (laser energy per cm2 ) incident on the diamond surface. A tightly focused beam spot increases the available fluence, increasing the rate of ablation. It is therefore very important to measure the waist of the beam after L3 in the three lens system.
 ==Focal Spot Characterization==
@@ Line 52: / Line 54: @@
 {| cellpadding="3" style="text-align:center; margin: 1em auto 1em auto"
 |-
-| [[Image:xscan_005_map.png|left|thumb|300px|5a]] || &nbsp; || [[Image:yscan_003_map.png|right|thumb|300px|5b]]
+| [[Image:xscan_005_map.png|left|thumb|300px|Figure 9a]] || &nbsp; || [[Image:yscan_003_map.png|right|thumb|300px|Figure 9b]]
 |-
 |}
 {| cellpadding="3" style="text-align:center; margin: 1em auto 1em auto"
 |-
-| [[Image:xscan_005_fit.png|left|thumb|300px|5c]] || &nbsp; || [[Image:yscan_003_fit.png|right|thumb|300px|5d]]
+| [[Image:xscan_005_fit.png|left|thumb|300px|Figure 9c]] || &nbsp; || [[Image:yscan_003_fit.png|right|thumb|300px|Figure 9d]]
 |-
 |}
-*Color maps of the two orthoganol scans of beam focal region, where the color represents the charge per pulse seen on the wire in arbitrary units.
+Figures 9a and 9b are color maps of the two orthoganol scans of beam focal region, where the color represents the charge per pulse seen on the wire in arbitrary units.
-*Projections of the color maps shown in Figure 6 onto the transverse axis with Gaussian fits to central peak over a flat background.]]
+Figures 9c and 9d are projections of the color maps shown in Figure 6 onto the transverse axis with Gaussian fits to central peak over a flat background.]]
-Each pixel in the plots shown in Figures 7 represents one laser pulse, with the color representing the pulse height integral. The lower-most row should be ignored because the scanning program was not yet fully synchronized to the raster pattern. The widths of the focal spot in x and y are shown in the RMS values of the fits in Figure 8. The values in x and y are roughly the same, 65 µm vs 48 µm respectively. Figure 7a shows a maximum intensity at a z position of 4.8mm, however it is interesting to note that the shape of the focal spot does not appear to change drastically away from this point. The optical setup has a narrow focal spot with a wide depth of field which is ideal for the purpose of laser ablation. From this study it was also concluded that the use of a collimator at the focal point of L1 and L2 greatly reduced the background seen by the harp scan and should be used during the ablation process to protect the diamond surface away from the ablation point
+Each pixel in the plots shown in Figures 9 represents one laser pulse, with the color representing the pulse height integral. The lower-most row should be ignored because the scanning program was not yet fully synchronized to the raster pattern. The widths of the focal spot in x and y are shown in the RMS values of the fits in Figure 9c,d. The values in x and y are roughly the same, 65 µm vs 48 µm respectively. Figure 9b shows a maximum intensity at a z position of 4.8mm, however it is interesting to note that the shape of the focal spot does not appear to change drastically away from this point. The optical setup has a narrow focal spot with a wide depth of field which is ideal for the purpose of laser ablation. From this study it was also concluded that the use of a collimator at the focal point of L1 and L2 greatly reduced the background seen by the harp scan and should be used during the ablation process to protect the diamond surface away from the ablation point
 ==Ablation Rate==

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 [[Image:GP2000b.png|left|thumb|250px| Figure 4: Average laser output as a function of total shots fired.]]
 An average cut depth of 38µm per complete pass would estimate a total of over 2.6 million pulses to reach the final depth of 20 µm or roughly 7 complete laser medium fills. The ablation setup has methods to compensate for fluctuations in average laser energy so that the diamond surface remains smooth to within ± 0.5µm (these methods will be discussed in detail in a later section). However, even with these corrections, allowing the average laser energy to vary by 50% over the course of a single pass results in non-uniform ablation across the diamond which is too exaggerated to compensate for. It is then desirable to extend the lifetime of the laser gas medium so that average power remains constant over a single pass. Ideally, the laser would have a gas life time which exceeds the total number of pulses required to bring the diamond sample to 20µm. An Oxford GP-2000 cryogenic gas purification system and Millipore particulate filter were installed in a closed loop with the laser cavity as shown in Figure 3. The system pumps the laser gas medium through a liquid nitrogen cold trap removing contaminants generated during the lasing process, extending the laser gas life time by over an order of magnitude. The plot below shows the average pulse energy as a function of pulses completed. Figure 4 shows the comparison between running the laser with (blue) and without (red) the gas purification system. Using the gas purifier in line with the laser cavity resulted in an order of magnitude increase in number of total pulses fired. Also, the average output energy of the laser increased significantly due to filtration of halogen spoiling contaminants inside the laser cavity. In some cases only a single fill was required to ablate a diamond from start to finish-greatly reducing the surface variation on the diamond radiator and the cost of running the machine. It is conclusive to say that without the use of the gas purification system this laser would not be viable for use as a light source for diamond ablation purposes.
 ==Laser Beamline==
-[[Image:spherabs.png|right|thumb|200px|Zygo image of pulses made on diamond after passing through a single focusing lens.]] [[Image:goodfocus.png|right|thumb|200px|Zygo image of pulses made on diamond after passing through the three lens system.]]
+[[Image:spherabs.png|right|thumb|200px|Figure 6:Zygo image of pulses made on diamond after passing through a single focusing lens.]] [[Image:goodfocus.png|right|thumb|200px|Figure 7:Zygo image of pulses made on diamond after passing through the three lens system.]]
-[[Image:ablation_full.png|center|thumb|300px|Rendering of ablation beamline]]
+[[Image:ablation_full.png|center|thumb|300px|Figure 8:Rendering of ablation beamline]]
-Figure 1 illustrates the arrangement of the ablation set up. A series of quartz plates are positioned immediately in front of the laser aperture so that a small sample of the beam (<5%) is reflected onto two separate energy meters labeled energy meter 1 and energy meter 2. Energy meter 1 is part of the laser’s on board energy feedback system which is used to control the output energy and stabilize the pulse-to-pulse variation to within 5%. Energy meter 2 measures each laser pulse incident on the diamond target during the ablation process. Figure 5a shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX.
+Figure 8 illustrates the arrangement of the ablation set up. A series of quartz plates are positioned immediately in front of the laser aperture so that a small sample of the beam (<5%) is reflected onto two separate energy meters labeled energy meter 1 and energy meter 2. Energy meter 1 is part of the laser’s on board energy feedback system which is used to control the output energy and stabilize the pulse-to-pulse variation to within 5%. Energy meter 2 measures each laser pulse incident on the diamond target during the ablation process. Figure 6 shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX.
 The focus of the laser defines the cutting tool with which the diamond is shaped. An ill-defined focused will ablate non-uniformly as the diamond is rastered across it making it extremely difficult to cut uniformly to 20 µm thickness without cracking the thin diamond membrane. The geometry of the focus also determines the fluence (laser energy per cm^2 ) incident on the diamond surface. A tightly focused beam spot increases the available fluence, increasing the rate of ablation. It is therefore very important to measure the waist of the beam after L3 in the three lens system.
-The laser beam then passes through a series of lenses as shown in Figure 4. Lenses L1 and L2 are positioned with overlapping focal lengths so that the output of L2 is a highly parallel, expanded beam. This was to remove large spherical aberrations due to imperfections in the quartz lenses.
+The laser beam then passes through a series of lenses as shown in Figure 8. Lenses L1 and L2 are positioned with overlapping focal lengths so that the output of L2 is a highly parallel, expanded beam. This was to remove large spherical aberrations due to imperfections in the quartz lenses.
-Figure 5a shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. If the focal spot that created these patterns was rastered over an entire diamond it would result in a radiator with large surface variations rendering it unusable for GlueX. The focus of the laser defines the cutting tool with which the diamond is shaped. An ill-defined focused will ablate non-uniformly as the diamond is rastered across it making it extremely difficult to cut uniformly to 20 µm thickness without cracking the thin diamond membrane. The geometry of the focus also determines the fluence (laser energy per cm2 ) incident on the diamond surface. A tightly focused beam spot increases the available fluence, increasing the rate of ablation. It is therefore very important to measure the waist of the beam after L3 in the three lens system.
+Figure 6 shows two columns of broad asymmetric patterns in a diamond sample cut using only a single lens for a varying number of laser pulses. Figure 7 shows the improvement in beam shape gained after using the three lens setup.
 ==Focal Spot Characterization==